I inquired to three officiants last month. Rev. Jack Day and Rev. Tim Herring are $150. Rev. Kevin Knox is $200. Add an extra $100 if you have a custom wedding and want a rehearsal.
Contact these individuals (and others) and they'll send you packages of what they can do for you before, during and after your ceremony. I was able to get a good sense of their style by visiting their web sites and then watching DFTW wedding videos at STVS Weddings.