Yes, I use spreadsheets for all vacations, whether it's 3 weeks through the US or a weekend getaway to Vienna (I'm in Europe

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Things that can be on my budget list
Flight - based on average price for time of year.
Hotel - based on average hotel price for the city & time of year
Transportation - I don't drive, have to make a budget for public transport or Uber/Lyft/Taxi
Park tickets - If going to Disney or other themeparks
Food & drinks - an average per day for breakfast/lunch/dinner/snacks/bottled water etc. + one or two nicer meals
Merchandise - Not very big on my list, but always budget in some money
Sightseeing - Museums, tours, other experiences
Tips - tipping is not a thing in my culture, I have to think about it when travelling to the US
Extra - always budget 100 euro extra for everything I didn't think about on forehand